Methods for confirming charged-particle generation in an instrument, and related instruments
Methods for confirming charged-particle generation in an instrument are provided. A method to confirm charged-particle generation in an instrument includes providing electrical connections to a charged-particle optics system of the instrument while the charged-particle optics system is in a chamber....
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | Methods for confirming charged-particle generation in an instrument are provided. A method to confirm charged-particle generation in an instrument includes providing electrical connections to a charged-particle optics system of the instrument while the charged-particle optics system is in a chamber. The method includes coupling an electrical component having an impedance to charged-particle current generated in the chamber. Moreover, the method includes measuring an electrical response by the electrical component to the charged-particle current. Related instruments are also provided. |
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