Process control circuit and method for controlling a processing arrangement

According to an embodiment, a processing circuit includes: a data acquisition circuit configured to acquire process data and measurement data of a processing arrangement, the process data including a plurality of process event data in accordance with a plurality of process events and the measurement...

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Bibliographische Detailangaben
1. Verfasser: Seidel, Ulf
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:According to an embodiment, a processing circuit includes: a data acquisition circuit configured to acquire process data and measurement data of a processing arrangement, the process data including a plurality of process event data in accordance with a plurality of process events and the measurement data including a plurality of measurement event data in accordance with a plurality of measurement events; a data merging circuit configured to provide state information, the state information representing a status of the processing arrangement, and accuracy information representing an accuracy of the state information; wherein the data merging circuit is further configured to update the state information based on the acquired process event data, wherein the accuracy of the state information is decreased, and, independently from updating the state information, to downdate the state information based on the acquired measurement event data, wherein the accuracy of the state information is increased.