Mirror-based microelectromechanical system for optical image stabilization
This document describes a mirror-based microelectromechanical system (MEMS) for optical image stabilization in image-capture systems. The mirror-based MEMS includes a MEMS platform that can rotate about a pitch axis and/or a yaw axis. MEMS rotors drive rotational motion of the MEMS platform. One or...
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Zusammenfassung: | This document describes a mirror-based microelectromechanical system (MEMS) for optical image stabilization in image-capture systems. The mirror-based MEMS includes a MEMS platform that can rotate about a pitch axis and/or a yaw axis. MEMS rotors drive rotational motion of the MEMS platform. One or more piezo films, flexibly connected to the stationary platform, extend over the MEMS rotors. The piezo films have a resistance value that varies when the piezo films are deformed by the MEMS rotors. The piezo films form a bridge circuit across the MEMS platform, which produces an output voltage that varies with the resistance values. A MEMS mirror, coupled to the MEMS platform, reflects light rays to an image sensor. A microcontroller receives pitch and yaw information from the image sensor. The microcontroller accesses the output voltage and determines how much to move the MEMS platform to compensate for the pitch and yaw of the camera. |
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