Shape measuring system and shape measuring method

A shape of an object is measured with a high degree of accuracy. A shape measurement system comprises: a distance measuring head for irradiating an object with light and receiving light reflected from the object; a distance measuring device for generating a distance detection waveform on the basis o...

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Bibliographische Detailangaben
Hauptverfasser: Taniguchi, Atsushi, Yazaki, Akio, Watanabe, Masahiro, Maruno, Kenji, Hariyama, Tatsuo
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A shape of an object is measured with a high degree of accuracy. A shape measurement system comprises: a distance measuring head for irradiating an object with light and receiving light reflected from the object; a distance measuring device for generating a distance detection waveform on the basis of the reflected light; and a control device for analyzing the distance detection waveform and calculating a measured distance value to the object. The shape measurement system is characterized in that the control device calculates a feature amount of the distance detection waveform and performs at least one of a process of correcting an error in the measured distance value by substituting the feature amount into a correction formula and a process of performing a confidence weighting of an error in the measured distance value by substituting the feature amount into a confidence weighting formula.