Silicon carbide field-effect transistor including shielding areas

A semiconductor component includes: gate structures extending from a first surface into an SiC semiconductor body; a drift zone of a first conductivity type formed in the SiC semiconductor body; first mesas and second mesas arranged between the gate structures in the SiC semiconductor body; body are...

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Bibliographische Detailangaben
Hauptverfasser: Bergner, Wolfgang, Elpelt, Rudolf, Siemieniec, Ralf, Aichinger, Thomas, Kueck, Daniel, Peters, Dethard, Hell, Michael, Basler, Thomas, Schulze, Hans-Joachim, Leendertz, Caspar, Esteve, Romain
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor component includes: gate structures extending from a first surface into an SiC semiconductor body; a drift zone of a first conductivity type formed in the SiC semiconductor body; first mesas and second mesas arranged between the gate structures in the SiC semiconductor body; body areas of a second conductivity type arranged in the first mesas and the second mesas, the body areas each adjoining a first side wall of one of the gate structures; first shielding areas of the second conductivity type adjoining a second side wall of one of the gate structures; second shielding areas of the second conductivity type adjoining the body areas in the second mesas; and diode areas of the conductivity type of the drift zone, the diode areas forming Schottky contacts with a load electrode between the first shielding areas and the second shielding areas.