Nonwoven screens for dust trapping in laser discharge chambers

A system for removing particulate matter from the gas in a gas discharge laser includes one or more nonwoven screens which are optimized for, among others, manufacturability and feature integration. The nonwoven screens are configured for precisely directing the flow to optimize the separation of pa...

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Bibliographische Detailangaben
Hauptverfasser:	Gillespie, Walter Dale, Niemann, Ulrich
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING ENGINE PLANTS IN GENERAL GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNALCOMBUSTION ENGINES GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES ORENGINES IN GENERAL HEATING LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM LIGHTING MACHINES OR ENGINES IN GENERAL MECHANICAL ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION STEAM ENGINES TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	A system for removing particulate matter from the gas in a gas discharge laser includes one or more nonwoven screens which are optimized for, among others, manufacturability and feature integration. The nonwoven screens are configured for precisely directing the flow to optimize the separation of particles from the gas flow and provide sufficient surface area for improved dust adherence.