Atmospheric-pressure plasma processing apparatus and method using argon plasma gas

An atmospheric pressure plasma processing apparatus and method employing argon as a plasma gas in the absence of helium, including nanosecond pulse-powered electrodes having planar surfaces, and grounded electrodes having planar surfaces parallel to the surfaces of the powered electrodes and spaced-...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Cornelius, Carrie E, Tyner, David W, Cross, Joseph H, Roche, Gregory A
Format: Patent
Sprache:eng
Schlagworte:
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