Pressure sensor enabling high linearity of change in electrostatic capacitance

Pressure sensor enabling high linearity of change in electrostatic capacitance

A pressure sensor includes a base, a membrane disposed at a distance from the base, a first fixed electrode provided on the base so as to be opposite to the membrane and including a dielectric layer, and a second fixed electrode provided on the base so as to be opposite to the membrane. When pressur...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Tsuji, Daiki, Hamazaki, Ryohei
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A pressure sensor includes a base, a membrane disposed at a distance from the base, a first fixed electrode provided on the base so as to be opposite to the membrane and including a dielectric layer, and a second fixed electrode provided on the base so as to be opposite to the membrane. When pressure that acts on the membrane increases to cause the membrane to sag toward the base, the membrane comes in contact with the dielectric layer of the first fixed electrode before a distance between the membrane and the second fixed electrode becomes constant.