Heating device

This heating device (100) includes: a heater (10) for heating an object (1) to be heated; a temperature detection unit (20) for detecting a temperature of the object (1) to be heated; and a temperature regulator (30) which controls the heater (10) so as to make the temperature of the object (1) to b...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Tsubata, Hajime, Togawa, Hiroyuki, Yamada, Takaaki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:This heating device (100) includes: a heater (10) for heating an object (1) to be heated; a temperature detection unit (20) for detecting a temperature of the object (1) to be heated; and a temperature regulator (30) which controls the heater (10) so as to make the temperature of the object (1) to be heated equal to the target temperature. The temperature detection unit (20) comprises temperature sensors (21, 22). An identification unit (34) identifies, from temperature data detected by the temperature sensors (21, 22) and manipulation quantity data corresponding to electric power applied to the heater (10), a heat transfer function between the heater (10) and the temperature sensors (21, 22), and a heat transfer function between the respective temperature sensors (21, 22). A determination unit (36) detects a change of the transfer functions, and determines an abnormality in the heater (10) or the temperature sensors (21, 22).