Bulk-acoustic wave resonator

Bulk-acoustic wave resonator

A bulk-acoustic wave resonator includes a substrate, a first electrode disposed on the substrate, a piezoelectric layer, of which at least a portion is disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a passivation layer disposed to cover the first electro...

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Hauptverfasser: Son, Jin Suk, Lee, Hwa Sun, Shin, Ran Hee, Lee, Tae Kyung, Kim, Sung Sun, Kyoung, Je Hong
Format: Patent
Sprache:eng
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ALLOYS
BASIC ELECTRONIC CIRCUITRY
CHEMISTRY
ELECTRICITY
FERROUS OR NON-FERROUS ALLOYS
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
METALLURGY
RESONATORS
TREATMENT OF ALLOYS OR NON-FERROUS METALS
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creator Son, Jin Suk
Lee, Hwa Sun
Shin, Ran Hee
Lee, Tae Kyung
Kim, Sung Sun
Kyoung, Je Hong
description A bulk-acoustic wave resonator includes a substrate, a first electrode disposed on the substrate, a piezoelectric layer, of which at least a portion is disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a passivation layer disposed to cover the first electrode and the second electrode. Either one or both of the first electrode and the second electrode includes an aluminum alloy layer. Either one or both of the piezoelectric layer and the passivation layer has aluminum nitride, or aluminum nitride added with a doping material, having a ratio of an out-of-plane lattice constant "c" to an in-plane lattice constant "a" (c/a) of less than 1.58.
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subjects ALLOYS
BASIC ELECTRONIC CIRCUITRY
CHEMISTRY
ELECTRICITY
FERROUS OR NON-FERROUS ALLOYS
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
METALLURGY
RESONATORS
TREATMENT OF ALLOYS OR NON-FERROUS METALS
title Bulk-acoustic wave resonator
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