Bulk-acoustic wave resonator

A bulk-acoustic wave resonator includes a substrate, a first electrode disposed on the substrate, a piezoelectric layer, of which at least a portion is disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a passivation layer disposed to cover the first electro...

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Bibliographische Detailangaben
Hauptverfasser:	Son, Jin Suk, Lee, Hwa Sun, Shin, Ran Hee, Lee, Tae Kyung, Kim, Sung Sun, Kyoung, Je Hong
Format:	Patent
Sprache:	eng
Schlagworte:	ALLOYS BASIC ELECTRONIC CIRCUITRY CHEMISTRY ELECTRICITY FERROUS OR NON-FERROUS ALLOYS IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS METALLURGY RESONATORS TREATMENT OF ALLOYS OR NON-FERROUS METALS
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Beschreibung
Zusammenfassung:	A bulk-acoustic wave resonator includes a substrate, a first electrode disposed on the substrate, a piezoelectric layer, of which at least a portion is disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a passivation layer disposed to cover the first electrode and the second electrode. Either one or both of the first electrode and the second electrode includes an aluminum alloy layer. Either one or both of the piezoelectric layer and the passivation layer has aluminum nitride, or aluminum nitride added with a doping material, having a ratio of an out-of-plane lattice constant "c" to an in-plane lattice constant "a" (c/a) of less than 1.58.