Electronic devices comprising overlay marks, memory devices comprising overlay marks, and related methods

Electronic devices comprising overlay marks, memory devices comprising overlay marks, and related methods

An electronic device comprising at least one high aspect ratio feature in a base stack of materials, overlay marks in or on only an upper portion of the base stack of materials, and an additional stack of materials adjacent the base stack of materials, the additional stack of materials comprising th...

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Hauptverfasser: Jain, Harsh Narendrakumar, Kothari, Rohit, Hopkins, John D, Zhang, Xiaosong
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator Jain, Harsh Narendrakumar
Kothari, Rohit
Hopkins, John D
Zhang, Xiaosong
description An electronic device comprising at least one high aspect ratio feature in a base stack of materials, overlay marks in or on only an upper portion of the base stack of materials, and an additional stack of materials adjacent the base stack of materials, the additional stack of materials comprising the at least one high aspect ratio feature. Additional electronic devices and memory devices are disclosed, as are methods of forming high aspect ratio features in an electronic device.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Electronic devices comprising overlay marks, memory devices comprising overlay marks, and related methods
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