Electronic devices comprising overlay marks, memory devices comprising overlay marks, and related methods

Electronic devices comprising overlay marks, memory devices comprising overlay marks, and related methods

An electronic device comprising at least one high aspect ratio feature in a base stack of materials, overlay marks in or on only an upper portion of the base stack of materials, and an additional stack of materials adjacent the base stack of materials, the additional stack of materials comprising th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Jain, Harsh Narendrakumar, Kothari, Rohit, Hopkins, John D, Zhang, Xiaosong
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:An electronic device comprising at least one high aspect ratio feature in a base stack of materials, overlay marks in or on only an upper portion of the base stack of materials, and an additional stack of materials adjacent the base stack of materials, the additional stack of materials comprising the at least one high aspect ratio feature. Additional electronic devices and memory devices are disclosed, as are methods of forming high aspect ratio features in an electronic device.