Enhanced automatic wafer centering system and techniques for same

Systems and techniques for determining and correcting inter-wafer misalignments in a stack of wafers transported by a wafer handling robot. An enhanced automatic wafer centering system is provided that may be used to determine a smallest circle associated with the stack of wafers, which may then be...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mooring, Benjamin Wayne, Thaulad, Peter S, Herzig, Brett M, Blank, Richard M
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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