Enhanced automatic wafer centering system and techniques for same
Systems and techniques for determining and correcting inter-wafer misalignments in a stack of wafers transported by a wafer handling robot. An enhanced automatic wafer centering system is provided that may be used to determine a smallest circle associated with the stack of wafers, which may then be...
Gespeichert in:
| Hauptverfasser: | , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | Mooring, Benjamin Wayne Thaulad, Peter S Herzig, Brett M Blank, Richard M |
| description | Systems and techniques for determining and correcting inter-wafer misalignments in a stack of wafers transported by a wafer handling robot. An enhanced automatic wafer centering system is provided that may be used to determine a smallest circle associated with the stack of wafers, which may then be used to determine whether or not the stack of wafer meets various process requirements and/or if a centering correction can be made to better align the wafers with a receiving station coordinate frame. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US11581214B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US11581214B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US11581214B23</originalsourceid><addsrcrecordid>eNrjZHB0zctIzEtOTVFILC3Jz00syUxWKE9MSy1SSE7NK0ktysxLVyiuLC5JzVVIzEtRKElNzsjLLCxNLVZIyy9SKE7MTeVhYE1LzClO5YXS3AyKbq4hzh66qQX58anFBYlAg1JL4kODDQ1NLQyNDE2cjIyJUQMAILwx-Q</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Enhanced automatic wafer centering system and techniques for same</title><source>esp@cenet</source><creator>Mooring, Benjamin Wayne ; Thaulad, Peter S ; Herzig, Brett M ; Blank, Richard M</creator><creatorcontrib>Mooring, Benjamin Wayne ; Thaulad, Peter S ; Herzig, Brett M ; Blank, Richard M</creatorcontrib><description>Systems and techniques for determining and correcting inter-wafer misalignments in a stack of wafers transported by a wafer handling robot. An enhanced automatic wafer centering system is provided that may be used to determine a smallest circle associated with the stack of wafers, which may then be used to determine whether or not the stack of wafer meets various process requirements and/or if a centering correction can be made to better align the wafers with a receiving station coordinate frame.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230214&DB=EPODOC&CC=US&NR=11581214B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25547,76298</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230214&DB=EPODOC&CC=US&NR=11581214B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Mooring, Benjamin Wayne</creatorcontrib><creatorcontrib>Thaulad, Peter S</creatorcontrib><creatorcontrib>Herzig, Brett M</creatorcontrib><creatorcontrib>Blank, Richard M</creatorcontrib><title>Enhanced automatic wafer centering system and techniques for same</title><description>Systems and techniques for determining and correcting inter-wafer misalignments in a stack of wafers transported by a wafer handling robot. An enhanced automatic wafer centering system is provided that may be used to determine a smallest circle associated with the stack of wafers, which may then be used to determine whether or not the stack of wafer meets various process requirements and/or if a centering correction can be made to better align the wafers with a receiving station coordinate frame.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHB0zctIzEtOTVFILC3Jz00syUxWKE9MSy1SSE7NK0ktysxLVyiuLC5JzVVIzEtRKElNzsjLLCxNLVZIyy9SKE7MTeVhYE1LzClO5YXS3AyKbq4hzh66qQX58anFBYlAg1JL4kODDQ1NLQyNDE2cjIyJUQMAILwx-Q</recordid><startdate>20230214</startdate><enddate>20230214</enddate><creator>Mooring, Benjamin Wayne</creator><creator>Thaulad, Peter S</creator><creator>Herzig, Brett M</creator><creator>Blank, Richard M</creator><scope>EVB</scope></search><sort><creationdate>20230214</creationdate><title>Enhanced automatic wafer centering system and techniques for same</title><author>Mooring, Benjamin Wayne ; Thaulad, Peter S ; Herzig, Brett M ; Blank, Richard M</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US11581214B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>Mooring, Benjamin Wayne</creatorcontrib><creatorcontrib>Thaulad, Peter S</creatorcontrib><creatorcontrib>Herzig, Brett M</creatorcontrib><creatorcontrib>Blank, Richard M</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Mooring, Benjamin Wayne</au><au>Thaulad, Peter S</au><au>Herzig, Brett M</au><au>Blank, Richard M</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Enhanced automatic wafer centering system and techniques for same</title><date>2023-02-14</date><risdate>2023</risdate><abstract>Systems and techniques for determining and correcting inter-wafer misalignments in a stack of wafers transported by a wafer handling robot. An enhanced automatic wafer centering system is provided that may be used to determine a smallest circle associated with the stack of wafers, which may then be used to determine whether or not the stack of wafer meets various process requirements and/or if a centering correction can be made to better align the wafers with a receiving station coordinate frame.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_US11581214B2 |
| source | esp@cenet |
| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | Enhanced automatic wafer centering system and techniques for same |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-16T23%3A33%3A34IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Mooring,%20Benjamin%20Wayne&rft.date=2023-02-14&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS11581214B2%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |