Flow controller, valve arrangement and method

A flow controller includes a valve unit for influencing the flow of a fluid through a fluid channel, a flow sensor for detecting the flow of the fluid through the fluid channel, a pressure sensor arrangement for detecting a fluid pressure of the fluid, and a control unit which is adapted to, in resp...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Klassen, Daniel, Falkenhahn, Valentin, Gommel, Gerhard
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A flow controller includes a valve unit for influencing the flow of a fluid through a fluid channel, a flow sensor for detecting the flow of the fluid through the fluid channel, a pressure sensor arrangement for detecting a fluid pressure of the fluid, and a control unit which is adapted to, in response to the flow being within a measurement range of the flow sensor, assume a first operating mode, and, in the first operating mode, to perform a first closed-loop flow control on the basis of the flow detected by the flow sensor, and, in response to the flow being outside the measurement range of the flow sensor, assume a second operating mode, and, in the second operating mode, to perform an open-loop flow control on the basis of the detected fluid pressure and/or to perform a second closed-loop flow control on the basis of the detected fluid pressure.