Resonant process monitor

Embodiments described herein include a resonant process monitor and methods of forming such a resonant process monitor. In an embodiment, the resonant process monitor includes a frame that has a first opening and a second opening. In an embodiment, a resonant body seals the first opening of the fram...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Tae, Patrick John, Pan, Yaoling, Willwerth, Michael D, Tedeschi, Leonard, Chan, Kelvin, Goel, Ashish, Kraus, Philip Allan, Lu, Chih-shun, Subramani, Anantha, Krithivasan, Vijaykumar, Mao, Shimin
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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