Magnetic sensor and magnetic sensor manufacturing method

A magnetic sensor 1 includes: a nonmagnetic substrate 10; a sensitive element 31 laminated on the substrate 10, the sensitive element 31 being made of a soft magnetic material, the sensitive element 31 having a longitudinal direction and a transverse direction and having uniaxial magnetic anisotropy...

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Bibliographische Detailangaben
Hauptverfasser: Endo, Daizo, Ohashi, Haruhisa, Shino, Tatsunori
Format: Patent
Sprache:eng
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Zusammenfassung:A magnetic sensor 1 includes: a nonmagnetic substrate 10; a sensitive element 31 laminated on the substrate 10, the sensitive element 31 being made of a soft magnetic material, the sensitive element 31 having a longitudinal direction and a transverse direction and having uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction, the sensitive element 31 being configured to sense a magnetic field by a magnetic impedance effect; and a pair of thin-film magnets 20a, 20b laminated on the substrate 10 and disposed to face each other in the longitudinal direction across the sensitive element 31, the pair of thin-film magnets 20a, 20b being configured to apply a magnetic field in the longitudinal direction of the sensitive element 31.