System for treating tetraalkylammonium hydroxide-containing liquid and method for treating same

A system for treating a tetraalkylammonium hydroxide-containing liquid having a high-pressure type reverse osmosis membrane device concentrating a liquid to be treated containing tetraalkylammonium hydroxide at a concentration side, and a line for supplying the concentrated liquid to be treated by t...

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Bibliographische Detailangaben
Hauptverfasser: Narita, Hiroki, Mizuma, Shohei, Ono, Yoshinori
Format: Patent
Sprache:eng
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Zusammenfassung:A system for treating a tetraalkylammonium hydroxide-containing liquid having a high-pressure type reverse osmosis membrane device concentrating a liquid to be treated containing tetraalkylammonium hydroxide at a concentration side, and a line for supplying the concentrated liquid to be treated by the reverse osmosis membrane device to an evaporator further concentrating the concentrated liquid to be treated.