Package structure and fabrication methods

The present disclosure relates to methods and apparatus for forming a thin-form-factor semiconductor package. In one embodiment, a glass or silicon substrate is structured by micro-blasting or laser ablation to form structures for formation of interconnections therethrough. The substrate is thereaft...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Chen, Han-Wen, Verhaverbeke, Steven, Park, Giback, Tonini, Diego, Cho, Kyuil, Cellere, Giorgio, Dicaprio, Vincent
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:The present disclosure relates to methods and apparatus for forming a thin-form-factor semiconductor package. In one embodiment, a glass or silicon substrate is structured by micro-blasting or laser ablation to form structures for formation of interconnections therethrough. The substrate is thereafter utilized as a frame for forming a semiconductor package with embedded dies therein.