Semiconductor die contact structure and method

A system and method for forming a semiconductor die contact structure is disclosed. An embodiment comprises a top level metal contact, such as copper, with a thickness large enough to act as a buffer for underlying low-k, extremely low-k, or ultra low-k dielectric layers. A contact pad or post-passi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Yu, Chen-Hua, Liu, Chung-Shi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A system and method for forming a semiconductor die contact structure is disclosed. An embodiment comprises a top level metal contact, such as copper, with a thickness large enough to act as a buffer for underlying low-k, extremely low-k, or ultra low-k dielectric layers. A contact pad or post-passivation interconnect may be formed over the top level metal contact, and a copper pillar or solder bump may be formed to be in electrical connection with the top level metal contact.