Angular rate sensor

An angular rate sensor includes an annular resonator. The resonator includes an annular base material made of a first material, and an annular first low thermal conductor made of a second material having a lower thermal conductivity than the first material, the first low thermal conductor being sand...

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Bibliographische Detailangaben
Hauptverfasser:	Ikeda, Takashi, Uchino, Ryohei
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NAVIGATION PERFORMING OPERATIONS PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SEMICONDUCTOR DEVICES SURVEYING TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	An angular rate sensor includes an annular resonator. The resonator includes an annular base material made of a first material, and an annular first low thermal conductor made of a second material having a lower thermal conductivity than the first material, the first low thermal conductor being sandwiched between an annular first region and an annular second region on an inner side of the first region in the base material over substantially an entire circumference of the resonator.