Polymer, organic layer composition and method of forming patterns

A polymer, an organic layer composition including the polymer, and a method of forming a pattern using the organic layer composition, the polymer including a reaction product of a first compound represented by Chemical Formula 1 and a second compound represented by Chemical Formula 2:(CHO)n1-Ar1-X-A...

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Bibliographische Detailangaben
Hauptverfasser: Park, Yushin, Kim, Sunghwan, Jung, Hyeonil
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A polymer, an organic layer composition including the polymer, and a method of forming a pattern using the organic layer composition, the polymer including a reaction product of a first compound represented by Chemical Formula 1 and a second compound represented by Chemical Formula 2:(CHO)n1-Ar1-X-Ar2-(CHO)n2  [Chemical Formula 1]wherein, in Chemical Formula 1, X is O, S, or NR, in which R is a hydrogen, or a substituted or unsubstituted C1 to C30 alkyl group, Ar1 and Ar2 are independently a substituted or unsubstituted C6 to C30 aromatic ring group, and n1 and n2 are independently an integer of 1 to 3;Ar3-(OH)m  [Chemical Formula 2]wherein, in Chemical Formula 2, Ar3 is a substituted or unsubstituted C10 to C30 fused aromatic ring group in which at least two rings are fused, and m is an integer of 1 to 3.