Method for manufacturing array substrate, array substrate and display device

The present disclosure provides a method for manufacturing an array substrate, an array substrate, and a display device. By first forming holes in a first thin film transistor, then simultaneously performing hydrogen supplementation on the first thin film transistor and a second thin film transistor...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Liao, Wenjun, Qu, Jiawei, Mo, Zailong, Li, Linxuan, Zhang, Taoran
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present disclosure provides a method for manufacturing an array substrate, an array substrate, and a display device. By first forming holes in a first thin film transistor, then simultaneously performing hydrogen supplementation on the first thin film transistor and a second thin film transistor, and then forming holes in the second thin film transistor, the first thin film transistor and the second thin film transistor can be repaired and compensated in different degrees by hydrogen supplementation.