Chemical liquid manufacturing apparatus and manufacturing method of chemical liquid

A chemical liquid manufacturing apparatus is provided. The manufacturing apparatus at least includes an ion exchange medium and an ion adsorption medium configured downstream from the ion exchange medium. A material of the ion adsorption medium includes a resin material having an amide bond or an im...

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Hauptverfasser: Cole-Yocom, Marcia, Hinzie, Bryan, Helzer, Jack W, Chen, Yuan, Ahmadiannamini, Pejman
Format: Patent
Sprache:eng
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Zusammenfassung:A chemical liquid manufacturing apparatus is provided. The manufacturing apparatus at least includes an ion exchange medium and an ion adsorption medium configured downstream from the ion exchange medium. A material of the ion adsorption medium includes a resin material having an amide bond or an imide bond. A manufacturing method of a chemical liquid using the apparatus is also provided.