Showerhead shroud

A processing chamber includes an upper surface and a showerhead arranged to supply gases through the upper surface into the processing chamber. At least a portion of the showerhead extends above the upper surface of the processing chamber. A shroud enclosure is arranged on the upper surface of the p...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Borth, Andrew, Ramsayer, Christopher
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A processing chamber includes an upper surface and a showerhead arranged to supply gases through the upper surface into the processing chamber. At least a portion of the showerhead extends above the upper surface of the processing chamber. A shroud enclosure is arranged on the upper surface of the processing chamber. The shroud enclosure is arranged around the portion of the showerhead extending above the upper surface of the processing chamber and is configured to isolate radio frequency interference generated by the showerhead.