Capacitor

A capacitor that includes a substrate having a main surface with at least one of a recess or a projection, a dielectric film extending along the at least one of the recess or the projection and having an equivalent oxide thickness of 600 nm or more, and a conductor film covering at least part of the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Nakagawa, Hiroshi, Ashimine, Tomoyuki, Murase, Yasuhiro
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A capacitor that includes a substrate having a main surface with at least one of a recess or a projection, a dielectric film extending along the at least one of the recess or the projection and having an equivalent oxide thickness of 600 nm or more, and a conductor film covering at least part of the dielectric film.