Ceramic, probe guiding member, probe card, and socket for package inspection

A ceramic contains, in mass percent: Si3N4: 20.0 to 60.0%, ZrO2: 25.0 to 70.0%, and one or more oxides selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5: 5.0 to 15.0%. The ceramic has a coefficient of thermal expansion as high as that of si...

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Bibliographische Detailangaben
Hauptverfasser:	Mori, Kazumasa, Eto, Shunichi, Yamagishi, Wataru
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE LIME, MAGNESIA MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES METALLURGY PHYSICS REFRACTORIES SLAG TESTING TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	A ceramic contains, in mass percent: Si3N4: 20.0 to 60.0%, ZrO2: 25.0 to 70.0%, and one or more oxides selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5: 5.0 to 15.0%. The ceramic has a coefficient of thermal expansion as high as that of silicon and an excellent mechanical strength, allows fine machining with high precision, and prevents particles from being produced.