Charged particle beam apparatus

According to an embodiment, a charged particle beam apparatus includes a stage; a chamber; an emission source of the charged particle beam; an electronic optical system configured to emit the charged particle beam; an optical column including the emission source and the electronic optical system; a charged particle detector configured to detect a position of the charged particle beam; a first actuator configured to provide a frequency vibration to the stage based on a first excitation signal; a second actuator configured to provide a frequency vibration to the optical column based on a second excitation signal; a third actuator configured to provide a frequency vibration to the chamber based on a third excitation signal; and a controller configured to generate the first to third excitation signals.