Photoelectric conversion device, method of manufacturing photoelectric conversion device, and method of manufacturing semiconductor device

A photoelectric conversion device comprising: a first substrate that includes a pixel circuit including a photoelectric conversion element; a second substrate having a signal processing circuit that drives the pixel circuit or processes a signal from the pixel circuit; a connection part electrically...

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Bibliographische Detailangaben
Hauptverfasser: Oseto, Akira, Watanabe, Takanori, Ishii, Ryunosuke, Kakinuma, Nobuaki, Sakurai, Katsuhito, Kato, Tatsunori, Kobayashi, Hiroaki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A photoelectric conversion device comprising: a first substrate that includes a pixel circuit including a photoelectric conversion element; a second substrate having a signal processing circuit that drives the pixel circuit or processes a signal from the pixel circuit; a connection part electrically connecting the first substrate and the second substrate; and an inspection circuit, wherein the inspection circuit is formed in one of the first and second substrates and is connected to a wire supplying a first potential and being provided in the one of the first and second substrates, and the inspection circuit is connected via the connection part to a wire supplying a second potential and being provided in the other of the first and second substrates.