Drying unit and method for drying a substrate
A dryer comprises at least one dryer that is configured to supply thermal energy to a substrate in order to dry said substrate via evaporation of fluid. Information with regard to the degree of drying of the substrate may be precisely determined via comparison of a measurement value of the temperatu...
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Sprache: | eng |
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Zusammenfassung: | A dryer comprises at least one dryer that is configured to supply thermal energy to a substrate in order to dry said substrate via evaporation of fluid. Information with regard to the degree of drying of the substrate may be precisely determined via comparison of a measurement value of the temperature of the substrate with the equilibrium temperature that results given an equilibrium of latent heat and supplied thermal energy. Alternatively or additionally, the degree of drying of the substrate may be precisely set. |
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