System and method for 3D profile determination using model-based peak selection

This invention provides a system and method for selecting the correct profile from a range of peaks generated by analyzing a surface with multiple exposure levels applied at discrete intervals. The cloud of peak information is resolved by comparison to a model profile into a best candidate to repres...

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Hauptverfasser: Wang, Lei, Sun, Li, Jacobson, Lowell D, Li, David Y
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creator Wang, Lei
Sun, Li
Jacobson, Lowell D
Li, David Y
description This invention provides a system and method for selecting the correct profile from a range of peaks generated by analyzing a surface with multiple exposure levels applied at discrete intervals. The cloud of peak information is resolved by comparison to a model profile into a best candidate to represent an accurate representation of the object profile. Illustratively, a displacement sensor projects a line of illumination on the surface and receives reflected light at a sensor assembly at a set exposure level. A processor varies the exposure level setting in a plurality of discrete increments, and stores an image of the reflected light for each of the increments. A determination process combines the stored images and aligns the combined images with respect to a model image. Points from the combined images are selected based upon closeness to the model image to provide a candidate profile of the surface.
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The cloud of peak information is resolved by comparison to a model profile into a best candidate to represent an accurate representation of the object profile. Illustratively, a displacement sensor projects a line of illumination on the surface and receives reflected light at a sensor assembly at a set exposure level. A processor varies the exposure level setting in a plurality of discrete increments, and stores an image of the reflected light for each of the increments. A determination process combines the stored images and aligns the combined images with respect to a model image. 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subjects CALCULATING
COMPUTING
COUNTING
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
PICTORIAL COMMUNICATION, e.g. TELEVISION
TESTING
title System and method for 3D profile determination using model-based peak selection
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