System and method for 3D profile determination using model-based peak selection

This invention provides a system and method for selecting the correct profile from a range of peaks generated by analyzing a surface with multiple exposure levels applied at discrete intervals. The cloud of peak information is resolved by comparison to a model profile into a best candidate to represent an accurate representation of the object profile. Illustratively, a displacement sensor projects a line of illumination on the surface and receives reflected light at a sensor assembly at a set exposure level. A processor varies the exposure level setting in a plurality of discrete increments, and stores an image of the reflected light for each of the increments. A determination process combines the stored images and aligns the combined images with respect to a model image. Points from the combined images are selected based upon closeness to the model image to provide a candidate profile of the surface.