Semiconductor device packaging warpage control

A method of manufacturing a semiconductor device packaging panel is provided. The method includes forming a panel by placing a plurality of semiconductor die on a major side of a carrier substrate and encapsulating with an encapsulant the plurality semiconductor die and the major side of the carrier...

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Bibliographische Detailangaben
Hauptverfasser: Gan, Richard Te, Gupta, Vivek, Vincent, Michael B, Gong, Zhiwei, Hayes, Scott M
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A method of manufacturing a semiconductor device packaging panel is provided. The method includes forming a panel by placing a plurality of semiconductor die on a major side of a carrier substrate and encapsulating with an encapsulant the plurality semiconductor die and the major side of the carrier substrate. A plurality of warpage control features are formed with the encapsulant while encapsulating. The method further includes placing the panel onto a warpage control fixture to substantially flatten the panel. The plurality of warpage control features interlock with mating features of the warpage control fixture.