Vapor shield replacement system and method

A multi-shield plate includes a plate having a substantially flat upper surface and a substantially flat lower surface, a plurality of first windows formed in the plate and extending through the plate from the upper surface to the lower surface, and a plurality of vapor shields mounted to the plate,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Lin, Ping-Tse, Lin, Chun-Chih, Lien, Wen-Cheng, Ho, Monica
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A multi-shield plate includes a plate having a substantially flat upper surface and a substantially flat lower surface, a plurality of first windows formed in the plate and extending through the plate from the upper surface to the lower surface, and a plurality of vapor shields mounted to the plate, each vapor shield of the plurality of vapor shields configured to prevent passage of a vapor through a corresponding window of the plurality of windows. The multi-shield plate includes an aperture formed in the plate, the aperture aligned with a first window of the plurality of windows along an axis corresponding to the upper surface.