Capacitor structures for memory and method of manufacturing the same

A capacitor structure of memory is provided in the present invention, including structures of multiple cylindrical bottom electrode layers with bottoms contacting a substrate and extending vertically and upwardly from the substrate, the cylindrical shape of the bottom electrode layer has a sidewall...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Huang, Kai-Jyun
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A capacitor structure of memory is provided in the present invention, including structures of multiple cylindrical bottom electrode layers with bottoms contacting a substrate and extending vertically and upwardly from the substrate, the cylindrical shape of the bottom electrode layer has a sidewall with wavelike cross-section, and the wavelike cross-sections of adjacent bottom electrode layers are identical but shifted vertically by a distance, a capacitive dielectric layer on the bottom electrode layers, and a top electrode layer on the capacitive dielectric layer.