Fluid control device
A fluid control device includes a piezoelectric pump, a piezoelectric pump, a valve, and a container. The piezoelectric pump and the piezoelectric pump repeat the operation and the stop in accordance with a drive control cycle. The valve starts a control to close at the start timing of one cycle of...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A fluid control device includes a piezoelectric pump, a piezoelectric pump, a valve, and a container. The piezoelectric pump and the piezoelectric pump repeat the operation and the stop in accordance with a drive control cycle. The valve starts a control to close at the start timing of one cycle of the drive control cycle and starts a control to open at the stop of the piezoelectric pump and the piezoelectric pump. The time from the start timing of one cycle of the drive control cycle to the time at which the piezoelectric pump on the upstream side pump reaches a normal operation drive voltage is longer than the time from the start timing to the time at which the piezoelectric pump on the downstream side reaches a normal operation drive voltage. |
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