Point-of-use dynamic concentration delivery system with high flow and high uniformity

A method and a system are described for mixing liquid chemicals at dynamically changing or static ratios during a given dispense, with extremely high uniformity and repeatability. A mixer includes multiple fluid supply lines including elongate bladders defining a linear flow path and being configure...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Jacobson, Norman, Nasman, Ronald W, Huli, Lior, Grootegoed, James, deVilliers, Anton, Robison, Rodney
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A method and a system are described for mixing liquid chemicals at dynamically changing or static ratios during a given dispense, with extremely high uniformity and repeatability. A mixer includes multiple fluid supply lines including elongate bladders defining a linear flow path and being configured to laterally expand to collect a process fluid and laterally contract to deliver a selected volume of the process fluid to the mixer.