Bandgap measurements of patterned film stacks using spectroscopic metrology

Bandgap measurements of patterned film stacks using spectroscopic metrology

A spectroscopic metrology system includes a spectroscopic metrology tool and a controller. The controller generates a model of a multilayer grating including two or more layers, the model including geometric parameters indicative of a geometry of a test layer of the multilayer grating and dispersion...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Chouaib, Houssam, Kuznetsov, Alexander, Hu, Dawei, Shchegrov, Andrei V, Zhao, Qiang, Pandev, Stilian, Kaack, Torsten R, Lee, Liequan, Rosenberg, Aaron, Nguyen, Manh Dang, Lesoine, John, Tan, Zhengquan, Di, Ming, Wang, Tianhan
Format: Patent
Sprache:eng
Schlagworte:
COLORIMETRY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
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Beschreibung
Zusammenfassung:A spectroscopic metrology system includes a spectroscopic metrology tool and a controller. The controller generates a model of a multilayer grating including two or more layers, the model including geometric parameters indicative of a geometry of a test layer of the multilayer grating and dispersion parameters indicative of a dispersion of the test layer. The controller further receives a spectroscopic signal of a fabricated multilayer grating corresponding to the modeled multilayer grating from the spectroscopic metrology tool. The controller further determines values of the one or more parameters of the modeled multilayer grating providing a simulated spectroscopic signal corresponding to the measured spectroscopic signal within a selected tolerance. The controller further predicts a bandgap of the test layer of the fabricated multilayer grating based on the determined values of the one or more parameters of the test layer of the fabricated structure.