OLED panel production method and OLED panel production apparatus

Included are the steps of: forming a laminated body (7) by disposing a resin layer (12), an inorganic layer (3) having mean stress (Px) of 0 (zero) or having tensile stress, a TFT layer (4), an OLED element layer (5), and a sealing layer (6) in this order on an upper side of a supporting substrate (...

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Bibliographische Detailangaben
Hauptverfasser:	Tanaka, Tetsunori, Okazaki, Shoji, Yasuda, Yuki
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM METALLURGY PERFORMING OPERATIONS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	Included are the steps of: forming a laminated body (7) by disposing a resin layer (12), an inorganic layer (3) having mean stress (Px) of 0 (zero) or having tensile stress, a TFT layer (4), an OLED element layer (5), and a sealing layer (6) in this order on an upper side of a supporting substrate (50); and separating the supporting substrate (50) from the laminated body (7).