CMUT array comprising an acoustic window layer

An ultrasound array for acoustic wave transmission comprising at least one capacitive micro-machined ultrasound transducer (CMUT) cell (6), wherein the CMUT cell comprises a substrate (4); a first electrode (7); a cell membrane (5) having a second electrode (7′), which opposes the first electrode an...

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Bibliographische Detailangaben
Hauptverfasser:	Dirksen, Peter, Beckers, Lucas Johannes Anna Maria, Hakkens, Franciscus Johannes Gerardus
Format:	Patent
Sprache:	eng
Schlagworte:	ANALOGOUS ARRANGEMENTS USING OTHER WAVES DEAF-AID SETS DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MEASURING METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS PHYSICS PUBLIC ADDRESS SYSTEMS RADIO DIRECTION-FINDING RADIO NAVIGATION TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	An ultrasound array for acoustic wave transmission comprising at least one capacitive micro-machined ultrasound transducer (CMUT) cell (6), wherein the CMUT cell comprises a substrate (4); a first electrode (7); a cell membrane (5) having a second electrode (7′), which opposes the first electrode and the substrate with a cavity (8) there between, wherein the membrane is arranged to vibrate upon the cell activation; and an acoustic window layer (13), overlaying the cell membrane, and having an inner surface opposing the cell membrane and an outer surface. The acoustic window layer comprises a first layer comprising molecules of antioxidant and a polymeric material (47) with insulating particles (41) embedded therein, wherein the polymeric material consists of hydrogen and carbon atoms and has a density equal or below 0.95 g/cm3 and an acoustic impedance equal or above 1.45 MRayl. This acoustic window layer provides an improved acoustic performance, such as wide bandwidth and low attenuation, in application with the CMUT based array.