Calibration method of x-ray measuring device

A calibration method of an X-ray measuring device includes: mounting a calibration tool 102 on a rotating table 120; a moving position acquisition step of parallelly moving a position of an j-th sphere 106 with respect to a position of a first sphere 106, irradiating the calibration tool 102 with an...

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Bibliographische Detailangaben
Hauptverfasser: Maie, Hiromu, Kon, Masato, Miyakura, Jyota, Sasaki, Seiji
Format: Patent
Sprache:eng
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Zusammenfassung:A calibration method of an X-ray measuring device includes: mounting a calibration tool 102 on a rotating table 120; a moving position acquisition step of parallelly moving a position of an j-th sphere 106 with respect to a position of a first sphere 106, irradiating the calibration tool 102 with an X-ray 118, and acquiring, form an output of an X-ray image detector 124, a moving position Mj where the magnitude of a differential position Erjofa centroid position ImDisjh_Sphr_j of a projected image of the j(2£j£N)-th sphere 106 with respect to a centroid position ImDis1_Sphr_1 of a projected image of the first sphere 106 becomes equal to or less than a specified value Vx; a relative position calculation step of performing the moving position acquisition step on the remaining spheres; a feature position calculation step; a transformation matrix calculation step; a rotation detection step; a position calculation step; and a center position calculation step.