Lithographic cavity formation to enable EMIB bump pitch scaling

Embodiments include an electronic package with an embedded multi-interconnect bridge (EMIB) and methods of making such packages. Embodiments include a first layer, that is an organic material and a second layer disposed over the first layer. In an embodiment, a cavity is formed through the second la...

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Bibliographische Detailangaben
Hauptverfasser: Paital, Sameer, Tanaka, Hiroki, Darmawikarta, Kristof, May, Robert, Nie, Bai, Tan, Chung Kwang Christopher, Jones, Jesse
Format: Patent
Sprache:eng
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Zusammenfassung:Embodiments include an electronic package with an embedded multi-interconnect bridge (EMIB) and methods of making such packages. Embodiments include a first layer, that is an organic material and a second layer disposed over the first layer. In an embodiment, a cavity is formed through the second layer to expose a first surface of the first layer. A bridge substrate is in the cavity and is supported by the first surface of the first layer. Embodiments include a first die over the second layer that is electrically coupled to a first contact on the bridge substrate, and a second die over the second layer that is electrically coupled to a second contact on the bridge substrate. In an embodiment the first die is electrically coupled to the second die by the bridge substrate.