Electron source regeneration method

The present disclosure provides a method of regenerating an electron source, the electron source including at least one emission site fixed on a needle tip, and the emission site including a reaction product formed by metal atoms and gas molecules. The method includes regenerating the electron sourc...

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Bibliographische Detailangaben
Hauptverfasser: Wang, Xuehui, Yao, Xingjia, Li, Yijing, Luo, Tingting, Liu, Huarong, Zheng, Chunning, Wang, Junting, Zheng, Lei, Huang, Zhao
Format: Patent
Sprache:eng
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Zusammenfassung:The present disclosure provides a method of regenerating an electron source, the electron source including at least one emission site fixed on a needle tip, and the emission site including a reaction product formed by metal atoms and gas molecules. The method includes regenerating the electron source in situ if an emission capability of the electron source satisfies a regeneration condition.