Apparatus for stressing semiconductor substrates

Apparatus for use in preparing heterostructures having a reduced concentration of defects including apparatus for stressing semiconductor substrates to allow them to conform to a crystal having a different crystal lattice constant.

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Bibliographische Detailangaben
Hauptverfasser: Albrecht, Peter D, Pitney, John A, Voronkov, Vladimir V, Falster, Robert J
Format: Patent
Sprache:eng
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Zusammenfassung:Apparatus for use in preparing heterostructures having a reduced concentration of defects including apparatus for stressing semiconductor substrates to allow them to conform to a crystal having a different crystal lattice constant.