Apparatuses for selective TSV block testing

Embodiments of the disclosure are drawn to apparatuses and methods for testing through silicon vias (TSVs) which may be used, for example, to couple layers of a semiconductor memory device. The TSVs and/or the die around the TSVs may require testing. A switch circuit may be used to selectively coupl...

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Bibliographische Detailangaben
1. Verfasser: Ide, Akira
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Embodiments of the disclosure are drawn to apparatuses and methods for testing through silicon vias (TSVs) which may be used, for example, to couple layers of a semiconductor memory device. The TSVs and/or the die around the TSVs may require testing. A switch circuit may be used to selectively couple one or more test circuits to an amplifier. The test circuits may generate a voltage that is related to one or more parameters of the TSV being tested. The amplifier may amplify the voltage, which may be used to determine if the TSV passes the particular test determined by the test circuit selected by the switch circuit. The switch circuit and/or other components of the test circuits may be controlled by control signals to determine the operation of a particular test.