Semiconductor device and method of manufacturing semiconductor device

A semiconductor device includes: a substrate; a drift region disposed on a principal surface of the substrate; a first well region extending from a second principal surface of the drift region in a direction perpendicular to the second principal surface and having a bottom portion; a second well reg...

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Bibliographische Detailangaben
Hauptverfasser: Marui, Toshiharu, Hayami, Yasuaki, Hayashi, Tetsuya, Yamagami, Shigeharu, Ni, Wei, Takemoto, Keisuke, Numakura, Keiichiro, Tanaka, Ryota
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor device includes: a substrate; a drift region disposed on a principal surface of the substrate; a first well region extending from a second principal surface of the drift region in a direction perpendicular to the second principal surface and having a bottom portion; a second well region being in contact with the bottom portion and disposed at a portion inside the substrate located below the bottom portion; and a source region extending in a perpendicular direction from a region of the second principal surface provided with the first well region, and reaching the second well region. In a direction parallel to the second principal surface and oriented from a source electrode to a drain electrode, a distance of the second well region in contact with a gate insulating film is shorter than a distance of the first well region in contact with the gate insulating film.