Gate-all-around field effect transistor having multiple threshold voltages

One example of an apparatus includes a conducting channel region. The conducting channel region includes a plurality of epitaxially grown, in situ doped conducting channels arranged in a spaced apart relation relative to each other. A source positioned at a first end of the conducting channel region...

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Bibliographische Detailangaben
Hauptverfasser: Robison, Robert R, Vega, Reinaldo, Guillorn, Michael A, Hook, Terence, Bao, Ruqiang, Yamashita, Tenko
Format: Patent
Sprache:eng
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Zusammenfassung:One example of an apparatus includes a conducting channel region. The conducting channel region includes a plurality of epitaxially grown, in situ doped conducting channels arranged in a spaced apart relation relative to each other. A source positioned at a first end of the conducting channel region, and a drain positioned at a second end of the conducting channel region. A gate surrounds all sides of the conducting channel region and fills in spaces between the plurality of epitaxially grown, in situ doped conducting channels.