Valve and fluid supply line

The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve.A valve V includes a valve body 3 and a driving pressure control device 4 coupled to the valve body 3. The driving pressu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Matsuda, Takahiro, Komehana, Katsunori, Tanno, Ryutaro, Aikawa, Kenji, Harada, Akihiro, Suzuki, Yuya, Ochiishi, Masahiko, Shinohara, Tsutomu
Format: Patent
Sprache:eng
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