Valve and fluid supply line

The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve.A valve V includes a valve body 3 and a driving pressure control device 4 coupled to the valve body 3. The driving pressu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Matsuda, Takahiro, Komehana, Katsunori, Tanno, Ryutaro, Aikawa, Kenji, Harada, Akihiro, Suzuki, Yuya, Ochiishi, Masahiko, Shinohara, Tsutomu
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve.A valve V includes a valve body 3 and a driving pressure control device 4 coupled to the valve body 3. The driving pressure control device 4 includes: a driving pressure introduction path 431 connected to a driving pressure supply source G outside a line; an automatic valve 411 that opens and closes the driving pressure introduction path 431; a driving pressure introduction path 433 that couples to a driving pressure introduction port 3a of the valve body 3; an automatic valve 412 that opens and closes the driving pressure introduction path 433 in conjunction with the automatic valve 411 and opens and closes an exhaust passage 44 that discharges a driving pressure from the driving pressure introduction path 433; and a driving pressure introduction path 432 that couples the driving pressure introduction path 431 and the driving pressure introduction path 433 via the automatic valve 411 and the automatic valve 412.